Skip to main content

Semiconductor metrology products

Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.

TXRF 3800e  product image

Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.

TXRF 3760  product image

Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers

TXRF 310Fab  product image

Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300 mm wafers

TXRF-V310  product image

In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers

WaferX 310   product image

Simultaneous WDXRF spectrometer for wafer metal film metrology; up to 200 mm wafers

WDA-3650  product image

Sequential WDXRF spectrometer for elemental analysis and thin-film metrology of large and/or heavy samples

AZX 400 wavelength dispersive XRF for large samples

Process XRR, XRF, and XRD metrology tool for blanket and patterned wafers; up to 300 mm wafers

MFM310   product image

XRF and optical metrology tool for blanket and patterned wafers; up to 300 mm wafers

Onyx Hybrid XRF and Optical metrology FAB tool