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Texture analysis of a Cu wiring film using the Orientation Distribution Function (ODF)

AppNote B-XRD1087: texture analysis of a Cu wiring film using ODF

Background

Since there is a strong relation between the material characteristics and the crystal orientation of metals and many other industrial materials, quantitative analyses of crystallites orientation and their distributions are of great importance. Pole figure measurements are a common method to quantitatively analyze orientation. In this Application Byte, we used the Orientation Distribution Function (ODF) to evaluate the crystallites orientation of a Cu wiring film from a pole figure measurement.

リガクのX線回折装置(XRD)

全自動多目的X線回折装置 SmartLab

装置が最適条件を教えてくれるガイダンス機能を実現。

全自動多目的X線回折装置 SmartLab SE

リガクの分析ノウハウを凝縮した「ガイダンス」機能を搭載。

デスクトップX線回折装置 MiniFlex

卓上タイプの高性能多目的粉末回折分析装置。

試料水平型多目的X線回折装置 Ultima IV

あらゆる用途のための高性能、多目的XRDシステム。